Barrier Layers Deposited at Low Temperature on Metal Carrier Foil for the Use in μc-Si Solar Cells
نویسندگان
چکیده
Barrier layer material deposited on stainless steel substrate has been under investigation. These layers are part of a film-Si module, presently under development at ECN. Low temperature (< 250°C) processing is required in order to avoid impurity diffusion from the stainless steel foil. Novel materials based on nano particles combined with organic/ inorganic polymers and SiOx precipitated from the liquid phase have been deposited onto stainless steel foil. Nano particles with organic/ inorganic polymers reveal homogenous layers with voltage breakdown values exceeding 500 V. To test the functionality of the concept, thin-film Si solar cells are currently prepared by VHF-PECVD in combination with the different barrier layers.
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